Article 13215

Title of the article

MATHEMATICAL MODELING OF TRANSIENT TEMPERATURES’ EFFECT ON MEMS-STRUCTURES OF THIN-FILM RESISTIVE-STRAIN SENSORS

Authors

Bormotov Aleksey Nikolaevich, Doctor of engineering sciences, professor, sub-department of automation and control, Penza State Technological University (1a/11 Baydukova lane, Penza, Russia), aleks21618@yandex.ru
Kosorotov Gennadiy Nikolaevich, Candidate of engineering sciences, associate professor, sub-department of automation and control, Penza State Technological University (1a/11 Baydukova lane, Penza, Russia), aleks21618@yandex.ru
Belozubov Evgeniy Mikhaylovich, Doctor of engineering sciences, head of department, Research Institute of Physical Measurements (10 Volodarskogo street, Penza, Russia), aleks21618@yandex.ru

Index UDK

681.5.62-6:51-74

Abstract

Background. The object of the study is a thin-film resistive-strain pressure sensor (TRPS) and sensing elements, which are constructed in the form of MEMS struc-tures. The subject of study is the impact of transient temperatures and thermal de-formations in the temperature field, deformation and electrical parameters of the load cells. The purpose of work is to develop methods and means to minimize the effect of transient temperature fields and thermal deformations with simultaneous meas-urement of temperature gages on the basis of mathematical modeling of temperature fields, deformation and electrical parameters of load cells.
Materials and methods. The studies were conducted using the principles and methods of system analysis, theory of mathematical modeling and mathematical sta-tistics under conditions of unsteady temperature fields and thermal deformations with simultaneous measurement of its own temperature gages.
Results. The authors developed the methods and means of minimizing errors in measurement of pressure in conditions of transient temperature and thermal deforma-tions. The researchers obtained a mathematical model of uninformative conversion of a thermal EMF into an output signal of thin-film MEMS structures of TRPS with identical tensoelements, which can provide solutions for any TRPS with the bridge circuit if necessary.
Conclusions. The advantage of the proposed solutions is the reduced impact of non-stationary temperatures due to the possibility of separate accounting of the tem-perature of each strain gauge. In addition, the advantage of this solution is that the temperature of each individual account gage allows to consider the individual char-acteristics of each temperature, thereby reducing the error of measurement under conditions of unsteady temperature fields and thermal deformations.

Key words

modeling, strain gage, thermistor, thermal deformation, transient temperature, transient temperature field.

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References

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Дата создания: 02.10.2015 15:18
Дата обновления: 05.10.2015 14:31